NEWS RELEASE

FOR IMMEDIATE RELEASE

Company Contact:
John Dunn
CSD Epitaxy, Ltd.
Phone: +44-161-929-7434
Fax: +44-161-929-0904
Email: johnd@csd-ltd.co.uk

CSD EPITAXY LTD ANNOUNCES THE ACQUISITION OF EPITAXY PRODUCT LINE FROM MATTSON TECHNOLOGY INC.

Cheshire, England, March 17, 2003 - CSD Epitaxy Ltd (CSD Epitaxy), a global provider of epitaxial processing equipment, announced today that the company has finalized an agreement with Mattson Technology, Inc. (Nasdaq: MTSN), a leading supplier of advanced processing equipment used to manufacture semiconductors, in which CSD Epitaxy will acquire Mattson´s epitaxial product lines. The terms of the agreement were not disclosed.

Upon closing, CSD Epitaxy assumed ownership rights for the EpiPro and Gemini product lines. CSD Epitaxy will continue to manufacture and sell the EpiPro systems and support the large installed base of Gemini systems. CSD Epitaxy will provide sales, marketing and technical support services for both product lines worldwide. CSD Epitaxy will distribute spare parts for the installed system base from its locations in Asia, Europe and the United States.

"As part of our strategy to focus on core businesses, we chose to transition our epi products to a provider that specializes in these products as a primary focus," said Mike Pfarr, general manager of Mattson Technology´s Epi Business Unit. "We feel confident that CSD Epitaxy, which shares our commitment to customer service and support, has the experience, resources and capabilities to support our customers´ needs. We will work closely with CSD Epitaxy to help make the transition as seamless as possible for our customers."

"We are pleased that Mattson Technology chose to transition its epi product line to CSD Epitaxy," said Andrew Goode, president and chief executive officer of CSD Expitaxy. "This transaction allows us to enhance our product offering and expand our customer base. We intend to build on the technology foundation established by Mattson Technology to deliver new solutions and service offerings to our customers."

About CSD Epitaxy
CSD Epitaxy Ltd is a leading global supplier of epitaxy processing equipment and technical support services. CSD Epitaxy retains the rights to manufacture and market the Gemini^TM and the EpiPro ^TM product lines. Headquartered in Cheshire, England, the company maintains sales and support network in the United States, Europe, Asia/Pacific, and Japan. For more information, please contact CSD Epitaxy Ltd, 1 Pacific House, Pacific Road, Altrincham, Cheshire, England WA14 5BJ, Telephone: +44-161-929-7434. Fax: +44-161-929-0904. Email: johnd@csd-ltd.co.uk

About Mattson Technology, Inc.
Mattson Technology, Inc. is a leading supplier of semiconductor wafer processing equipment used in "front-end" fabrication of integrated circuits. The company is a market leader in dry strip and RTP, and its products combine advanced process technology on high-productivity platforms backed by industry-leading support. Since beginning operations in 1989, the company´s core vision has been to help bring technology leadership and productivity gains to semiconductor manufacturers worldwide. Headquartered in Fremont, Calif., the company maintains sales and support centers throughout the United States, Europe and Asia. For more information, please contact Mattson Technology, Inc., 2800 Bayview Drive, Fremont, Calif. 94538. Telephone: (800) MATTSON/(510) 657-5900. Fax: (510) 226-8241. Internet: www.mattson.com.

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